本文主要研究内容
作者谭学强（2019）在《磁控溅射纳米Cu膜织物导电性能研究》一文中研究指出：磁控溅射法具有薄膜厚度可控、纯度高、低温高速、附着力好、操作控制方便、装置性能稳定、环境友好等优点,因此,在各种功能性纺织品的开发过程中,采用磁控溅射法在纺织品表面制备纳米薄膜的技术越来越受到重视。本课题采用磁控溅射法在涤纶无纺布表面溅射沉积纳米Cu膜,对纳米Cu膜织物的导电性能进行了研究,并利用复合镀膜的方法,在Cu膜上下表面分别沉积ITO、ZnO膜,形成ZnO/Cu/ITO三明治复合薄膜结构,从而防止氧气与Cu膜接触,为提高导电性薄膜织物的性能提供了新的思路与解决方案。论文首先优化了导电性纳米Cu膜织物的溅射工艺条件(溅射压强、溅射功率、溅射时间),结果表明:当溅射压强为0.2 Pa,溅射功率为120W,溅射时间为40 min时,Cu膜的导电性能最好;同时,研究并分析了溅射Cu膜的结晶状态、薄膜厚度、溅射速率与导电性的关系,发现在绝大多数情况下,Cu膜的导电性能与结晶强度和薄膜厚度呈正相关关系,即Cu膜的结晶情况越好,其导电性越好;Cu薄膜厚度增加,则导电性能也相应提高。然后,通过对暴露在空气中溅射Cu膜织物导电性随时间的变化情况研究,探讨了各种溅射工艺条件下所镀Cu膜的氧化规律。研究表明:当溅射压强为0.2 Pa,溅射功率为120 W,溅射时间为40 min时,Cu膜的氧化速率最慢,与导电性能变化规律相同,即Cu膜导电性能越好,其氧化速率越慢。另外,通过采用复合镀膜的方式,在织物表面先溅射一层ZnO膜,然后溅射一层Cu膜,再溅射一层ITO膜,形成ZnO/Cu/ITO三明治复合膜结构,并研究了Cu/ITO复合膜和ZnO/Cu/ITO复合膜的抗氧化规律和导电性能的优化。研究表明,对于Cu/ITO复合膜而言,当ITO膜的溅射压强为0.3 Pa,溅射功率为80 W,溅射时间为30 min时,Cu/ITO复合膜的导电性能最好;而对于ZnO/Cu/ITO复合膜而言,当ZnO膜的溅射压强为1 Pa,溅射功率为90 W,溅射时间为30 min时,ZnO/Cu/ITO复合膜的导电性能最好。最后,在相同的环境条件下,将制备好的Cu膜、ZnO/Cu/ITO复合膜放置在空气中120天,测试了两种薄膜的表面形貌、表面元素含量、结晶情况和导电性能。结果表明:放置120天后的Cu膜表面出现细微裂痕,并有团状物质生成,薄膜表面的均匀性、连续性遭到了破坏,薄膜表面氧元素含量从0%增加到12.95%,方块电阻值从12.6 Ω/□上升到198.7Ω/□,上升了186.1 Ω/□,导电性能明显下降,薄膜表面结晶的衍射峰强度明显降低;而ZnO/Cu/ITO复合膜的表面形貌基本没有发生改变,保持其原有的均匀性、连续性,薄膜表面氧元素含量从5.38%增加到6.04%,仅增加了0.66%,方块电阻值从11.8 Ω/□上升到17.8 Ω/□,仅上升了6 Ω/□,导电性能基本没变,依然良好,ZnO/Cu/ITO复合膜中Cu膜表面结晶的衍射峰强度基本上没有变化,结晶状况依然良好,这说明ZnO/Cu/ITO复合膜具有良好的抗氧化效果,该方法制备的导电织物具有良好的导电稳定性。
Abstract
ci kong jian she fa ju you bao mo hou du ke kong 、chun du gao 、di wen gao su 、fu zhao li hao 、cao zuo kong zhi fang bian 、zhuang zhi xing neng wen ding 、huan jing you hao deng you dian ,yin ci ,zai ge chong gong neng xing fang zhi pin de kai fa guo cheng zhong ,cai yong ci kong jian she fa zai fang zhi pin biao mian zhi bei na mi bao mo de ji shu yue lai yue shou dao chong shi 。ben ke ti cai yong ci kong jian she fa zai di guan mo fang bu biao mian jian she chen ji na mi Cumo ,dui na mi Cumo zhi wu de dao dian xing neng jin hang le yan jiu ,bing li yong fu ge du mo de fang fa ,zai Cumo shang xia biao mian fen bie chen ji ITO、ZnOmo ,xing cheng ZnO/Cu/ITOsan ming zhi fu ge bao mo jie gou ,cong er fang zhi yang qi yu Cumo jie chu ,wei di gao dao dian xing bao mo zhi wu de xing neng di gong le xin de sai lu yu jie jue fang an 。lun wen shou xian you hua le dao dian xing na mi Cumo zhi wu de jian she gong yi tiao jian (jian she ya jiang 、jian she gong lv 、jian she shi jian ),jie guo biao ming :dang jian she ya jiang wei 0.2 Pa,jian she gong lv wei 120W,jian she shi jian wei 40 minshi ,Cumo de dao dian xing neng zui hao ;tong shi ,yan jiu bing fen xi le jian she Cumo de jie jing zhuang tai 、bao mo hou du 、jian she su lv yu dao dian xing de guan ji ,fa xian zai jue da duo shu qing kuang xia ,Cumo de dao dian xing neng yu jie jing jiang du he bao mo hou du cheng zheng xiang guan guan ji ,ji Cumo de jie jing qing kuang yue hao ,ji dao dian xing yue hao ;Cubao mo hou du zeng jia ,ze dao dian xing neng ye xiang ying di gao 。ran hou ,tong guo dui bao lou zai kong qi zhong jian she Cumo zhi wu dao dian xing sui shi jian de bian hua qing kuang yan jiu ,tan tao le ge chong jian she gong yi tiao jian xia suo du Cumo de yang hua gui lv 。yan jiu biao ming :dang jian she ya jiang wei 0.2 Pa,jian she gong lv wei 120 W,jian she shi jian wei 40 minshi ,Cumo de yang hua su lv zui man ,yu dao dian xing neng bian hua gui lv xiang tong ,ji Cumo dao dian xing neng yue hao ,ji yang hua su lv yue man 。ling wai ,tong guo cai yong fu ge du mo de fang shi ,zai zhi wu biao mian xian jian she yi ceng ZnOmo ,ran hou jian she yi ceng Cumo ,zai jian she yi ceng ITOmo ,xing cheng ZnO/Cu/ITOsan ming zhi fu ge mo jie gou ,bing yan jiu le Cu/ITOfu ge mo he ZnO/Cu/ITOfu ge mo de kang yang hua gui lv he dao dian xing neng de you hua 。yan jiu biao ming ,dui yu Cu/ITOfu ge mo er yan ,dang ITOmo de jian she ya jiang wei 0.3 Pa,jian she gong lv wei 80 W,jian she shi jian wei 30 minshi ,Cu/ITOfu ge mo de dao dian xing neng zui hao ;er dui yu ZnO/Cu/ITOfu ge mo er yan ,dang ZnOmo de jian she ya jiang wei 1 Pa,jian she gong lv wei 90 W,jian she shi jian wei 30 minshi ,ZnO/Cu/ITOfu ge mo de dao dian xing neng zui hao 。zui hou ,zai xiang tong de huan jing tiao jian xia ,jiang zhi bei hao de Cumo 、ZnO/Cu/ITOfu ge mo fang zhi zai kong qi zhong 120tian ,ce shi le liang chong bao mo de biao mian xing mao 、biao mian yuan su han liang 、jie jing qing kuang he dao dian xing neng 。jie guo biao ming :fang zhi 120tian hou de Cumo biao mian chu xian xi wei lie hen ,bing you tuan zhuang wu zhi sheng cheng ,bao mo biao mian de jun yun xing 、lian xu xing zao dao le po huai ,bao mo biao mian yang yuan su han liang cong 0%zeng jia dao 12.95%,fang kuai dian zu zhi cong 12.6 Ω/□shang sheng dao 198.7Ω/□,shang sheng le 186.1 Ω/□,dao dian xing neng ming xian xia jiang ,bao mo biao mian jie jing de yan she feng jiang du ming xian jiang di ;er ZnO/Cu/ITOfu ge mo de biao mian xing mao ji ben mei you fa sheng gai bian ,bao chi ji yuan you de jun yun xing 、lian xu xing ,bao mo biao mian yang yuan su han liang cong 5.38%zeng jia dao 6.04%,jin zeng jia le 0.66%,fang kuai dian zu zhi cong 11.8 Ω/□shang sheng dao 17.8 Ω/□,jin shang sheng le 6 Ω/□,dao dian xing neng ji ben mei bian ,yi ran liang hao ,ZnO/Cu/ITOfu ge mo zhong Cumo biao mian jie jing de yan she feng jiang du ji ben shang mei you bian hua ,jie jing zhuang kuang yi ran liang hao ,zhe shui ming ZnO/Cu/ITOfu ge mo ju you liang hao de kang yang hua xiao guo ,gai fang fa zhi bei de dao dian zhi wu ju you liang hao de dao dian wen ding xing 。
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论文详细介绍
论文作者分别是来自天津工业大学的谭学强，发表于刊物天津工业大学2019-07-05论文，是一篇关于磁控溅射论文,纳米膜论文,导电性能论文,复合膜论文,结晶强度论文,薄膜厚度论文,天津工业大学2019-07-05论文的文章。本文可供学术参考使用，各位学者可以免费参考阅读下载，文章观点不代表本站观点，资料来自天津工业大学2019-07-05论文网站，若本站收录的文献无意侵犯了您的著作版权，请联系我们删除。
标签：磁控溅射论文; 纳米膜论文; 导电性能论文; 复合膜论文; 结晶强度论文; 薄膜厚度论文; 天津工业大学2019-07-05论文;